Deposition Rate Calculator
Created by Stephen A. Filippone, Jan. 2018. Please contact us if you'd like any particular elements or compounds added.
Convert from rate to flux for different materials. (f.u. == formula unit)
| Material | Rate (Å/sec) |
| Å/s |
| Material | Material Flux (f.u./cm^2 sec) | Density (g/cc) | Molecular Weight (g/mol) |
|---|---|---|---|
Convert from flux to rate for different materials.
| Material | Flux (f.u./cm^2 sec) |
| #/cm^2 sec |
| Material | Rate (Å/sec) | Density (g/cc) | Molecular Weight (g/mol) |
|---|---|---|---|
Manually enter values to determine rates and fluxes
| Density | Molecular Weight | Rate | Flux |
| g/cm3 | g/mol | Å/sec | #/cm^2 sec |
Use for gas sources [Ref1]
| sscm | flux |
| sscm | #/sec |
Gas flux using the Langmuir equation
H2S rate = 3.54e20*P[torr] /(s*cm^2)
H2Se = rate 2.29e20*P[torr]/(s*cm^2)
Calculate stoichiometric rates for a fixed flux
Fixed Flux f.u./cm^2 sec
| Material | Stoichiometric ratio | Rate (Å/sec) | Density (g/cc) | Molecular Weight (g/mol) |
|---|---|---|---|---|