Facilities

Lines for system chilled water, low-T chiller loop, rough vacuum, compressed air, nitrogen, and process gases. Ground strip with copper running all the way to the basement. Receptacles for 3 power circuits: 32A backed up (see nearby UPS), 32A not backed up, and 56A not backed up for e-beam. Also see receptacle for conduit running to backing pump in adjacent room.

Date: 

June 30, 2016